Publication Number |
Title |
Priority Date |
CN-113943391-A |
Polymer resin and synthesis method thereof, photoresist containing polymer resin, preparation method of photoresist and use method of photoresist |
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Composition for forming lithography film, resist pattern forming method, and circuit pattern forming method |
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Compound, production method therefor, acid generator, composition, resist film, underlayer film, pattern formation method, and optical component |
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WO-2021230185-A1 |
Compound, production method therefor, composition, resist film, and pattern formation method |
2020-05-11 |
JP-2021100996-A |
Block copolymers, resin compositions and adhesive films |
2019-12-24 |
WO-2021112194-A1 |
Composition for forming underlayer film for lithography, underlayer film for lithography, resist pattern forming method, circuit pattern forming method, oligomer, and purification method |
2019-12-04 |