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| US-2020243339-A1 | Methods of doping a silicon-containing material, methods of forming a semiconductor device, and related semiconductor devices | 2019-01-24 |
| US-2016223559-A1 | Tetrazine-containing compounds and synthetic methods thereof | 2015-02-02 |
| JP-2015054853-A | Thin film forming raw material and thin film manufacturing method | 2013-09-13 |
| JP-6116007-B2 | Thin film forming raw material and thin film manufacturing method | 2013-09-13 |
| CN-104183480-A | Semiconductor device manufacturing method and substrate processing apparatus | 2013-05-24 |
